As in Focused Ion Beam

Cold Atoms Could Replace Hot Gallium In Focused Ion Beams

Because of the versatility of their approach—it can be used with a wide range of ions tailored to the task at hand—it is expected to have broad application in nanotechnology both for carving smaller features on semiconductors than now are possible and for nondestructive imaging of nanoscale structures with finer resolution than currently possible with electron microscopes.

I ran something on this a few months ago. MOTIS Operandi